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Photoreactive Polymers: The Science and Technology of Resists

Arnost Reiser




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 | #4090440 in Books |  1989-02 | Original language:English | PDF # 1 |  2.56 x.98 x1.57l, | File type: PDF | 409 pages

||From the Publisher|A comprehensive introduction to the theory and applications of resists. Discusses applications of polymers in the imaging industry, especially printing, and the fabrication of solid-state electronic devices. s resist systems in the order in w

Basic mechanisms and applications of photoresist chemistry in semiconductor device manufacturing, lithography, chemical engineering, and the graphic arts are discussed in this book. It gives a balanced view of the subject as it now stands and at the same time promotes an understanding of the perennial challenge of material science to meet the demands of new technology by the successful design of new materials. The presentation of the text follows the history of the subje...

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